Automobile Industry
Automotive Laser Manufacturing


































































































































































Product advantages:
Used for 4-8 inch original wafer, substrate and epitaxial wafer of various materials and polishing conditions
Thickness range: 0-1mm measurement accuracy: ± 1 μ M repetition accuracy: 0.2 μ m
Measurement time: 30s / PCS (according to the customer's detection trajectory)
Sample display:
Sample 1

Sample 2

Sample 3

| Item | Main parameters | ||
| General parameters | Wafer size | 4", 6" | |
| Number of boxes | Double-deck, 14 pcs | ||
| Loading and unloading method | Robot, mapping scanning | ||
| Motion platform | X stroke150mm, Y stroke150mm, |
Repetitive accuracy ±0.1 µm Repetitive accuracy ±0.1 µm |
|
| Capacity | 4", 240WPH 6", 220WPH | ||
| Detection performance | Detection function | Wafer (coated wafer) thickness, TTV, warpage | |
| Thickness test accuracy | ±0.5 µm. Repeatability: 0.1 µm (25 pieces continuously tested, 5 points for each piece) | ||
| Thickness range | ± 1 mm | ||
| TTV test accuracy | ± 0.5 um, repeatability: 0.2 µm | ||
| Warpage test accuracy | ± 2 µm. Test range: ± 600 µm. Repeatability: 1 µm | ||
| Environment requirement | Power supply specification | AC220V,50Hz | |
| Air source requirements | 0.5-0.7mpa compressed air, without obvious water vapor and grease | ||
| Using environment | Temperature: 15-40 ℃. Humidity requirement: 30% - 70%, no frost | ||
| Overall size | 1800mm*1300mm*2250mm | ||